Omm, Inc.

Ezekiel John Joseph Kruglick

Jian Jim Ma

Steffen Gloeckner

Philippe Marchand

Daniel J Reiley

William K Smock

In one implementation, a method for operating a plurality of MEMS devices including applying a magnitude of a selected actuation signal equal to a first substantially constant magnitude to an actuator to cause a movable structure to begin to accelerate from a first position to impact a motion stop at a second position. The method also includes decreasing the magnitude of the selected actuation signal in a first manner. The method further includes varying at least one of a start time and a duration of the decreasing magnitude of the selected actuation signal and observing a settling time of the movable structure in response to the step of varying. In some implementations, the method includes ascertaining a range of values for the start times and the corresponding durations for each of the plurality of MEMS devices that are capable of providing settling times of the movable structure in conformance with a predetermined specification based on the steps of varying and observing. Such an implementation can include using the ascertained range of values for each device and the selected actuation signal for determining an operating start time and a corresponding operating duration to construct an operating actuation signal capable of providing a settling time for all devices in conformance with the predetermined specification. The method also can include controlling a signal source with a programmed processor to selectively apply the operating actuation signal to the plurality of MEMS devices.

Method for determining and implementing electrical damping coefficients

A modular three-dimensional (3D) optical switch that is scalable and that provides monitor and control of MEMS mirror arrays. A first switch module includes an array of input channels. Light beams received from the input channels are directed toward a first wavelength selective mirror. The light beams are reflected off of the first wavelength selective mirror and onto a first array of moveable micromirrors. The moveable micromirrors are adjusted so that the light beams reflect therefrom and enter a second switch module where they impinge upon a second array of moveable micromirrors. The light beams reflect off of the second array of moveable micromirrors and impinge upon a second wavelength selective mirror. The light beams reflect off of the second wavelength selective mirror and into an array of output channels. The alignment or misalignment of a data path through the switch is detected by directing two monitor beams through the data path, one in the forward direction and one in the reverse direction. The position of each of the monitor beams is detected after its reflection from the second moveable micromirror that it hits. The position data is used to determine the angles of the moveable micromirrors in the data path.

Modular three-dimensional optical switch

In one embodiment, a MEMS apparatus having a MEMS array including a plurality of MEMS devices is provided. In some embodiments, each of the plurality of MEMS devices includes a movable structure and a second structure. In addition, in some embodiments, a plurality of signal sources are coupled to the plurality of MEMS devices so as to be capable of supplying actuation signals for actuating the movable structure to impact the second structure. Further, in some embodiments, at least one processor is coupled to the plurality of signal sources to control the actuation signals, and is configured such that each of the plurality of MEMS devices is provided with a corresponding custom actuation signal.

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San Diego, CA, United States of America

Ezekiel John Joseph Kruglick