Average Co-Inventor Count = 2.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Infineon Technologies Ag (3 from 14,724 patents)
3 patents:
1. 10096507 - Thin substrate electrostatic chuck system and method
2. 9601363 - Thin substrate electrostatic chuck system and method
3. 9030797 - Thin substrate electrostatic chuck system and method