Rafael-armament Development Authority Ltd.

Ben-gurion University of the Negev Research and Development Authority

Evgeny Eugene Frumker

Eliezer Rosenblum

Ezra Shamay

Ofer Pade

A method for extending scatterometry measurements of periodic structures created on a substrate into the deep UV and soft X-ray regions of the electromagnetic spectrum is presented. The method comprises measuring the scattering of a high harmonic generated (HHG) beam, which is created by a driving laser, that is scattered from the structures on the substrate. The scattered HHG beam is measured by a spectrometer or a detector sensitive to HHG radiation. Also presented is a system for carrying out the method.

Scatterometry with high harmonic generation (HHG) sources

A system and method for performing four dimensional multicolor nanotomography with high harmonics and attosecond pulses to attain spectrally resolved absorption data about the three-dimensional volumetric structure of a sample are disclosed. Also disclosed are embodiments of the system and method that have been adapted to perform four dimensional multicolor nanotomography absorption and index of refraction data about the three-dimensional volumetric structure of a sample, to perform five dimensional multicolor nanotomography with high harmonics and attosecond pulses to obtain spectrally resolved absorption data about the three-dimensional volumetric structure and temporal dynamics of the sample, to perform five dimensional multicolor nanotomography to obtain spectrally resolved absorption and index of refraction data about the three-dimensional volumetric structure and temporal dynamics of the sample, and to perform Fourier-domain Optical Coherence Tomography.

Multidimensional nanotomography with high harmonics and attosecond pulses

A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Object detection method and system

A method of evaluating optical disturbances occurring in a flow field around a solid body. The method includes performing a computational fluid dynamics (CFD) calculation to obtain a three-dimensional index-of-refraction field outside the solid body, and performing one or more ray tracing calculation based on the sindex-of-refraction field to botain a numerical estimater of the optical disturbances.

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Beer Sheva, Israel

Evgeny Eugene Frumker