Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Asml Netherlands B.v.

Chubb Lips Nederland Bv

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek

Evert Nieuwkoop

Erwin John Van Zwet

Franciscus Johannes Joseph Janssen

Hamed Sadeghian Marnani

Tjarko Adriaan Rudolf Van Empel

Huibert Visser

Lun Kai Cheng

Teunis Cornelis Van Den Dool

Oscar Franciscus Jozephus Noordman

Norbertus Benedictus Koster

Marcel Johannus Elisabeth Hubertus Muitjens

Diederik Jan Maas

Rik Kruidhof

Albert Dekker

Roger Wilhelmus Antonius Henricus Schmitz

Geerten Frans Ijsbrand Kramer

Frederik Van Der Graaf

Richard Versluis

Peter Martijn Toet

Johannes Fransiscus Maria Velthuis

Martinus Cornelius Johannes Maria Van Riel

Axel Sebastiaan Lexmond

Paulus Bartholomeus Johannes Schaareman

Aukje Arianne Annette Kastelijn

Johannes M Ewalds

Johan C Hordijk

Willem Arie Van Helden

Charles William Barras Potts

Martinus Henricus Johannes Lemmen

Michel Van Putten

Mathilde Gertrudis Maria De Kroon

Marcel Henk André Janssens

Marinus Cornelius Johannes Maria Van Riel

The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample

According to an aspect of the invention, there is provided a mirror structure for adaptive optics devices, characterized in that it comprises: an elastically deformable layer in response to an applied force, said deformable layer comprising a central portion reflective to said an incident light beam (F); a support substrate positioned spaced with respect to said deformable layer; a spacer element connected to said elastically deformable layer and support substrate and positioned there between, said spacer element being arranged so that the separation distance between said first and second inner surface is in the range between 2 and 100 micron; an inner chamber at least partially defined by said first and substrate and by said spacer element, said inner chamber containing a pressurized gas (G); an actuator system capable of causing a deformation of said central portion counteracting the pressure of said pressurized gas; wherein, in use, said central portion is deformed according to profiles such as to control said light beam. Advantages may include thermal robustness and improved dimensional scaling properties.

High power adaptive mirror

A radiation sensor device is disclosed for use with a radiation source, capable of emitting radiation with photon energies larger than the work function of the target comprising a target plate to be impacted by the radiation to generate photo-electrons, the target plate being electrically isolated from a shielding electrode. The shielding electrode is arranged to collect energy-filtered photo-electrons from the target plate, using an electrostatic barrier for the filtering. The target plate is constructed of a carbon material. A current measurement device is operative to keep the target plate at a preset voltage difference with respect to the shielding electrode and measure a photo-electron deficit current as a result of radiation impact on the target plate.

Radiation sensor device for high energy photons

A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Method and system for thermally conditioning an optical element

Apparatus and methods are used to control a polarization state of a radiation beam. A polarization control unit is configured to modulate a polarization state of at least a part of a radiation beam. A determination arrangement is configured to subsequently determine the polarization state of the at least a part of the radiation beam. A feedback unit is configured to provide signals to the polarization control arrangement based on at least the determined polarization state in order to correct for deviation in the polarization state of the part of the radiation beam from a desired polarization state. For example, the correction may ensure that the polarization state of the part of the radiation beam is at, or returns to, the desired polarization state.

Polarization control apparatus and method

An electronic lock is constructed to resemble the appearance and functionality of a conventional cylinder lock. Its key has a bit in which is mounted an integrated circuit chip storing the key code and including a transmission coil for inductive coupling with a reading head in the lock. The latter includes a coil for generating a high frequency alternating magnetic field across a localized region of the keyway concentrated via a toroidal ferrite core structure which defines a gap spanning the keyway through which the chip passes when the key bit is inserted. This core structure includes a U-shaped part in the stationary lock housing around which the coil is wound, and two parts mounted in the barrel, one to either side of the keyway, which register with the part in the housing when the barrel is in the key-reading position. Further ferrite pads may be mounted to either side of the coil in the key itself, to register with the ferrite parts in the barrel. By virtue of this core structure, optimum flux coupling between the lock and key may be achieved, thereby minimizing power consumption.

Electronic cylinder lock with inductively coupled key

A lock which is adapted to transduce the code from a key by electronic means is constructed to resemble the form and functionality of a conventional mechanical cylinder lock. A main casing houses the bolt, a rotatable thrower or cam for retracting the bolt, an electromechanical release mechanism which normally blocks rotation of the thrower, and a processor to control the release mechanism in response to the detected key code. The electronic reading means are located in association with the keyway of a rotatable barrel in a cylinder unit manufactured as a separate unit from the main casing. The thrower and barrel have respective cooperating mechanical couplings and the main casing and cylinder unit have respective cooperating electrical connectors. The lock is therefore assembled by attaching the cylinder unit to the outside of the main casing, thus establishing a rotary driving connection from the barrel to the thrower and establishing an electrical connection from the key reader to the processor.

Electronic key locks

Identification system

Growing community of inventors

Pijnacker, Netherlands

Evert Nieuwkoop