Aerotech, Inc.

Evan Mosier

Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.

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Pittsburgh, PA, United States of America

Evan Mosier