Gachon University of Industry-academic Cooperation Foundation

EunSeon Yu

Seongjae Cho

Jae Yoon Lee

A 1T DRAM cell device having two or more heterojunction surfaces perpendicular to the channel length direction and a quantum well at the drain region side. The 1T DRAM cell device described herein may be driven by GIDL or band-to-band tunneling, so that low voltage and high speed operation can be performed, and retention time and read current margin can be dramatically increased. It can also be driven as a memory device in harsh environments with high temperatures. Furthermore, since the heterojunction surfaces can be formed by vertically stacking epitaxial layers on a semiconductor substrate such as silicon, the conventional CMOS process technology can be used, and the area occupied by the device can be reduced as much as possible without limiting the channel length.

One-transistor DRAM cell device having quantum well structure

A method for fabricating a semiconductor device is carried out so that silicon nanowires may be made of vertically stacked one or more floating silicon layers, and a silicon buffer layer may be surrounded on each surface of the silicon nanowires with a sufficient thickness, e.g., close to the diameter of the nanowire, and then a silicon germanium shell may be formed on it. Thus, a semiconductor device having a silicon germanium shell channel structure can be fabricated with a uniform thickness even on a bulk silicon substrate using a conventional silicon CMOS process.

Fabrication method of semiconductor device having SIGe shell channel and semiconductor device fabricated by the same

An intelligent semiconductor device has a body region in which a channel is formed. The body region has a heterojunction of different semiconductor layers and a quantum well formed in a semiconductor layer in contact with a drain. The quantum well is configured to store holes generated in a depletion layer of the drain region and imitate a short-term memory, and to convert the short-term memory into a long-term memory by enabling holes to be injected into a charge storage layer when the holes stored in quantum well exceed a specific threshold value. It is possible to fabricate with a bulk semiconductor substrate and utilize the conventional CMOS technology.

Intelligent semiconductor device having SiGe quantum well

A p-channel tri-gate transistor has a silicon fin that protrudes from a bulk silicon substrate, a thin silicon-germanium active layer is formed on three sidewalls of the silicon fin, and a hole well is formed between the gate insulating film and the silicon fin in the active layer surrounded by the tri-gate by a valence band offset electric potential against the silicon fin for moving holes collected in the hole well along the active layer with a high hole-mobility. Thus, it is possible to have the effects of not only an ultra-high speed, low power operation, but also a body biasing through an integral structure of the silicon fin-body. The p-channel tri-gate transistor can be fabricated together with an n-channel FinFET transistor in one substrate by the same CMOS process.

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Seoul, South Korea

EunSeon Yu