Samsung Electronics Co., Ltd.

Lg Electronics Inc.

Eungsu Kim

Keonwoo Kim

Seungwon Shin

Byeongsang Kim

Dongyun Yeo

Hyanjung Lee

Heewon Min

Sangwook Park

Eunjun Cho

Hakyoung Kim

Wooram Kim

Geunsik Oh

Kyeongtea Bang

Sungheon Ryu

Kyeongseok Jeong

Jusang Kim

A lift apparatus for moving an object up and down in a substrate processing apparatus, the lift apparatus including a body configured to support the object while a lift hole, included in the body, is overlapped by the object in a vertical direction; a lift pin configured to move the object up and down by moving up and down in the lift hole; a bellows including an upper flange, a lower flange, and a flexible pipe; a connector combined with a lower portion of the lift pin in the flexible pipe and configured to interfere with downward movement of the lift pin and to allow at least one from among rotation, sliding, and tilting of the lift pin; a load sensor configured to measure vertical load generated in accordance with movement of the lift pin; and an actuator configured to move the lift pin up and down.

Lift apparatus and substrate processing apparatus including the same

Provided is a gas-liquid separator, including a connection pipe connected to a refrigerant pipe in the evaporator, the refrigerant pipe in which a two-phase refrigerant flows, a header connected to the connection pipe, wherein a gas refrigerant separated from the two-phase refrigerant flows inside the header, a bypass pipe connected to the header to guide a flow of the gas refrigerant to a compressor, a flow rate control valve installed at the bypass pipe, and a controller configured to control opening and closing of the flow rate control valve based on whether a preset condition is satisfied.

Gas-liquid separator and air conditioner having the same

An electrostatic chuck includes a chuck plate configured to mount a substrate, an insulation pillar provided outside the chuck plate, the insulation pillar having a pin hole formed therein, a first movable ring provided on the insulation pillar, surrounding a side of the chuck plate, a second movable ring configured to cover at least a part of an upper portion of the first movable ring, and a driving pin configured to move in the pin hole of the insulation pillar in a vertical direction, the driving pin overlapped by at least a part of the first movable ring and at least a part of the second movable ring in the vertical direction. The driving pin is configured to drive the first movable ring and the second movable ring in the vertical direction or to drive the second movable ring in the vertical direction.

Electrostatic chuck and substrate processing apparatus including the same

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Seoul, South Korea

Eungsu Kim