Samsung Display Co., Ltd.

Eun-Sun Choi

Myeng-Woo Nam

Jong-Won Hong

Seok-Rak Chang

Jin-Han Park

Jae-Kwang Ryu

Joon-Hyung Kim

Sung-Gon Kim

Uno Chang

Won-Yong Kim

Byung-Su Kim

Yong Sup Choi

A deposition apparatus includes a vacuum chamber, a sensor head located in the vacuum chamber and including a plurality of deposition rate measuring sensors, a sensor extractor coupled to the vacuum chamber and including a first vacuum maintaining valve, the sensor extractor being configured to extract one of the deposition rate measuring sensors to outside the vacuum chamber, and a sensor inserter coupled to the vacuum chamber and including a second vacuum maintaining valve, the sensor inserter being configured to insert one of the deposition rate measuring sensors into the sensor head.

Deposition apparatus providing improved replacing apparatus for deposition rate measuring sensor, and replacing method using the same

A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.

Organic layer deposition apparatus

Provided are a method of manufacturing an organic light emitting display apparatus, a surface treatment device for an organic light emitting display apparatus, and an organic light emitting display apparatus. To easily form organic emissive layers, the method includes: forming a first electrode on a substrate; forming on the first electrode a pixel defining layer having openings that expose predetermined portions of the first electrode; forming a charge carrying layer on the pixel defining layer and the first electrode exposed through the openings; hydrophobically treating portions of a surface of the charge carrying layer selectively, wherein the portions do not correspond to the openings, using a laser; forming organic emissive layers on the charge carrying layer; and forming a second electrode on the organic emissive layers so as to be electrically connected with the organic emissive layers.

Method of manufacturing organic light emitting display apparatus, surface treatment device for organic light emitting display apparatus, and organic light emitting display apparatus

Growing community of inventors

Yongin, South Korea

Eun-Sun Choi