Tokyo Ohka Kogyo Co., Ltd.

Eun Sol Jo

Tsuyoshi Nakamura

Kazuishi Tanno

A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component including a polymeric compound containing a structural unit having an acid decomposable group, the amount of the structural unit having an acid decomposable group, based on the combined total of all structural units contained in the base component being 51 mol % to 59 mol %, and the structural unit having an acid decomposable group includes a structural unit represented by general formula (a1-1) shown below (in which R represents a hydrogen atom, an alkyl group or a halogenated alkyl group; Z represents a single bond or an alkyl group; and Cis a group represented by general formula (Cp-1) shown below). 

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Incheon, South Korea

Eun Sol Jo