Samsung Display Co., Ltd.

Eun-Hye Park

Hyun Sook Kim

Bo-Sung Kim

Myung-Kwan Ryu

Seung-Ha Choi

Hyun-Jae Kim

Kyoung Seok Son

Doo-Na Kim

Hyun-Soo Lim

Doo-Hyoung Lee

Yeon-Taek Jeong

You-Seung Rim

Eok-Su Kim

Sho-Yeon Kim

Dong-Lim Kim

Byung-Hwan Chu

A thin film transistor substrate includes a gate electrode, a channel layer overlapping the gate electrode, a source electrode overlapping the channel layer, a drain electrode overlapping the channel layer and the source electrode, and a spacer disposed between the source electrode and the drain electrode.

Thin film transistor substrate and method of manufacturing a thin film transistor substrate

According to a method of manufacturing a thin film transistor substrate, a composition including a metal oxalate and a solvent for manufacturing an oxide semiconductor is coated to form a thin film, the thin film is annealed, and the thin film is patterned to form a semiconductor pattern.

Composition for manufacturing oxide semiconductor and method for manufacturing thin-film transistor substrate using the same

Growing community of inventors

Incheon, South Korea

Eun-Hye Park