Samsung Display Co., Ltd.

Eun-Gook Sung

Tae-Hyung Kim

Sang-Su Kim

Sung-Hwan Kim

Byoung-Seong Jeong

Je-Hyun Song

Tae-Hun Lee

Sung-Won Yang

A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit to which a substrate is detachably fixed. A conveyer unit conveys the moving unit in a first direction or in an opposite direction to the first direction. A deposition unit includes at least one deposition assembly for depositing a deposition material on the substrate. A discharge data acquisition unit acquires data associated with the amount of the deposition material discharged per unit time from the at least one deposition assembly. A transmission unit transmits the data acquired by the discharge data acquisition unit.

Deposition apparatus and method for manufacturing organic light emitting display apparatus by using the same

Growing community of inventors

Yongin, South Korea

Eun-Gook Sung