Samsung Electronics Co., Ltd.

Samusng Electronics Co., Ltd.

Euiyeol Kim

Jeong-Ho Lee

Jinyoung Kim

Heegeun Jeong

Sun-Hyun Kim

Youngwoo Chung

Heewoo Park

Hyounmin Baek

An image sensor includes; a substrate having a first surface and an opposing second surface and including unit pixels respectively having photoelectric conversion regions, a semiconductor pattern disposed in a first trench defining the unit pixels, the semiconductor pattern including a first semiconductor layer provided on an inner surface of the first trench and a second semiconductor layer provided on the first semiconductor layer, and a first contact provided on the second surface and connected to the semiconductor pattern. A height of the first semiconductor layer from a bottom surface of the first trench is less than a height of the second semiconductor layer from the bottom surface of the first trench.

Image sensor and method of fabricating same

A semiconductor device may include first and second sub chips stacked sequentially and a through contact electrically connecting the first and second sub chips to each other. Each of the first and second sub chips may include a substrate and a plurality of interconnection lines, which are interposed between the substrates. The interconnection lines of the second sub chip may include first and second interconnection lines having first and second openings, respectively, which are horizontally offset from each other. The through contact may be extended from the substrate of the second sub chip toward the first sub chip and may include an auxiliary contact, which is extended toward the first sub chip through the first and second openings and has a bottom surface higher than a top surface of the uppermost one of the interconnection lines of the first sub chip.

Semiconductor device with a through contact and method of fabricating the same

Semiconductor device including a through contact extending between sub-chips and method of fabricating the same

Growing community of inventors

Yongin-si, South Korea

Euiyeol Kim