Samsung Display Co., Ltd.

Eui-Shin Shin

Jae-Seok Park

Jin-Han Park

Young-Geun Cho

Cheol-Lae Roh

Jong-Heon Kim

Seung-Ho Choi

Joon-Hyung Kim

Chang-Mog Jo

Sung-Gon Kim

Myeng-Woo Nam

Kyu-Bum Kim

Woo-Dong Kim

Jeung-Woo Huh

Myeng Woo Nam

A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.

Coating method, and method of forming organic layer using the same

Provided is a mask for an evaporation apparatus, which includes a first division mask and a second division mask. The first and second division masks are directly bonded to each other by welding, thereby forming welding portion between the first and the second division masks. A method and apparatus for manufacturing a mask for evaporation are also provided. The division masks according to the embodiment do not use subframes, and are directly bonded to one another by welding, so that a shadow effect does not occur. The apparatus for manufacturing a mask for evaporation includes a work stage, a clamp fixing a first division mask and a second division mask to the work stage, and a laser welding part welding the first division mask to the second division mask. The apparatus may further include a first roller leading the laser welding part and a second roller following the laser welding part.

Mask for evaporation, and method and apparatus for manufacturing the same

A mask frame assembly using a plurality of stick-shaped split masks. The mask frame assembly includes a plurality of split masks, each of which includes a deposition pattern corresponding to a unit screen. Each of the split masks is formed of a plurality of partial masks to form the deposition pattern corresponding to a unit screen. Accordingly, the split masks accommodating a pattern corresponding to a large screen may be easily manufactured without an increase in the amount of etching errors.

Mask frame assembly for thin film deposition and the manufacturing method thereof

Provided are a surface inspection apparatus and method capable of detecting foreign materials on the surface of a substrate, and a slit coater having the surface inspection apparatus. In the surface inspection apparatus, a slit lighting unit irradiates slit-shaped light. An optical system splits the slit-shaped light into two beams traveling along two different paths, is incident upon a subject, and extracts an interference image caused by combination of the two beams reflected from the subject. An imaging device captures the interference image to output an image signal. An analysis unit acquires a luminance value of the image signal, analyzes the luminance value in real time, and determines whether or not foreign materials are present.

Interferometric surface inspection using a slit-shaped reference beam from inspection surface

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Yongin, South Korea

Eui-Shin Shin