California Institute of Technology

Doheny Eye Institute

Eui-Hyeok Yang

Mark Salman Humayun

Yu-Chong Tai

Wolfgang Fink

Ellis Fan-chuin Meng

Choonsup Lee

Thomas George

Dean V Wiberg

Yoshi Hishinuma

Techniques for transferring a membrane from one wafer to another wafer to form integrated semiconductor devices. In one implementation, a carrier wafer is fabricated to include a membrane on one side of the carrier wafer. The membrane on the carrier wafer is then bond to a surface of a different, device wafer by a plurality of joints. Next, the carrier wafer is etched away by a dry etching chemical to expose the membrane and to leave said membrane on the device wafer. Transfer of membranes with a wet etching process is also described.

Wafer-level transfer of membranes with gas-phase etching and wet etching methods

An implantable intraocular pressure sensor device for detecting excessive intraocular pressure above a predetermined threshold pressure is disclosed. The device includes a pressure switch that is sized and configured to be placed in an eye, wherein said pressure switch is activated when the intraocular pressure is higher than the predetermined threshold pressure. The device is optically powered and transmits data wirelessly using optical energy. In one embodiment, the pressure sensor device is a micro electromechanical system.

Optically powered and optically data-transmitting wireless intraocular pressure sensor device

Techniques for transferring a membrane from one wafer to another wafer to form integrated semiconductor devices.

Wafer-level transfer of membranes in semiconductor processing

Growing community of inventors

Stevenson Ranch, CA, United States of America

Eui-Hyeok Yang