Palo Alto Research Center Inc.

Xerox Corporation

Oracle International Corporation

Leland Stanford Junior University

Oracle America, Inc.

Eugene Michael Chow

Jengping Lu

David Kalman Biegelsen

Thomas Hantschel

Jeng Ping Lu

David Kirtland Fork

Dirk De Bruyker

Sourobh Raychaudhuri

Christopher L Chua

Armin R Volkel

Julie A Bert

Eric Peeters

Ashish V Pattekar

Michel A Rosa

Lara S Crawford

William S Wong

Meng H Lean

Gregory Lewis Whiting

Anne Plochowietz

Bowen Cheng

Bradley Rupp

Sven Kosgalwies

Rene A Lujan

Dirk DeBruyker

Timothy D Stowe

Saigopal Nelaturi

Ion Matei

Koenraad F Van Schuylenbergh

Mandana Veiseh

JengPing Lu

Gordon Todd Jagerson, Jr

Sergey Butylkov

Warren Bruce Jackson

Bing R Hsieh

Jurgen Hans Daniel

Matthew Adam Shreve

George Amos Gibson

Philipp Helmut Schmaelzle

Janos Veres

Armin Rainer Völkel

Qian Wang

Yunda Wang

Jamie Kalb

Thomas H DiStefano

Peter Kiesel

Noble Marshall Johnson

John E Cunningham

Patrick Yasuo Maeda

Gerald A Domoto

Yu Wang

Joerg Martini

Scott Albert Uhland

Michael L Chabinyc

Grace T Brewington

Ana Claudia Arias

Jason Donald Thompson

Ivan Shubin

Jing Zhou

Baomin Xu

Gregory B Anderson

Felicia Linn

James G Mitchell

Michael Yu Tak Young

JenPing Lu

Nan-Xing Hu

Chu-Heng Liu

Francisco Eduardo Torres

Eric J Shrader

Johan De Kleer

Adrien Pierre Cote

Tse Nga Ng

Matthew A Heuft

John Steven Paschkewitz

Ramkumar Abhishek

Michael I Recht

Jackson H Ho

Sean Emerson Doris

Kai Melde

Vanishree Rao

Michal V Wolkin

Michael Y Young

Pengfei Qi

Chinnwen Shih

Chinwen Shih

Anand Ramakrishnan

Albert Armes

William E Martin

Chris Storment

Fatemeh Primoradi

Vernon Powers

Veiseh Mandana

Michael A Rosa

Dirk Debruyer

Dirk Debruyker

Koenraad F Vanschuylenbergh

A machine vision system and method use lensless near-contact imaging with coherent illumination, or incoherent illumination, and high pixel count large format sensors (e.g., equivalent to at least 20 to 65 mega-pixels) to produce diffraction patterns of the micro-objects or the gray scale images of the micro-objects over a large overall field-of-view of the machine vision system. The machine vision system provides feedback to a microassembler system to position, orient, and assemble microscale devices like micro-LEDs over large working areas. The effective resolution of the machine vision system can be further improved through the use of gray scale and super-resolution image processing techniques.

Lensless near-contact imaging system for micro assembly

A micro-assembly system includes a reservoir that stores a supply of chiplets suspended in a suspension fluid. Each of the chiplets has a bottom major surface that defines a right side down orientation. The system includes a delivery surface or belt that delivers the chiplets from the reservoir to an assembly surface. The system includes a micro assembler that may arrange the first subset of the chiplets in a pattern on the assembly surface. The micro assembler moves the first subset of chiplets towards a subsequent assembly stage. The micro assembler has an array of field generators fixed relative to the assembly surface that move the first subset of the chiplets along the assembly surface in response to signals applied to each of the field generators.

Chiplet loader for microassembler

Disclosed herein are techniques for transferring particles in a pattern. In one implementation, a particle-transferring system includes a first substrate comprising a first surface configured to support a plurality of particles in a non-uniform pattern, and a particle transfer unit configured to remove the plurality of particles from the first surface in response to the plurality of particles being within a first gap. The system also includes a second substrate configured to remove the plurality of particles from the particle transfer unit and secure the plurality of particles to the second surface in response to the plurality of particles being within a second gap. The particle transfer unit is configured to transfer the plurality of particles and maintain the non-uniform pattern regardless of the positions of the plurality of particles, which are not predefined to fit features of the particle transfer unit.

High registration particles-transferring system

A microspring includes a film stack having a base disposed on a build plane and a spring member extending from the base. The film stack includes a compressive layer, a substantially stress-free layer, and a tensile layer. The film stack is formed of one or more materials that become superconducting below 140 K. A stress gradient in the film stack causes the spring member to curl away from the build plane of the base.

Stress engineered microspring for cryogenic superconducting circuits

A method of manufacturing superconductor structures includes depositing a release film on a substrate, forming a stack of films comprising an elastic material and a superconductor film, releasing a portion of the elastic material by selective removal of the release film so that portion lifts out of the substrate plane to form elastic springs. A method of manufacturing superconductor structures includes depositing a release film on a substrate, forming a stack of films comprising at least an elastic material, releasing a portion of the elastic material so that portion lifts out of a plane of the substrate to form elastic springs, and coating the elastic springs with a superconductor film.

Superconducting stress-engineered micro-fabricated springs

A device for delivery of particles into biological tissue includes at least one conduit and a propellant source fluidically coupled to the conduit and configured to deliver a propellant into the conduit. A particle source is configured to release elongated particles into the conduit, the elongated particles having a width, w, a length, l>w. The propellant source and the conduit are configured to propel the elongated particles in a collimated particle stream toward the biological tissue. An alignment mechanism is configured to align a longitudinal axis of the elongated particles to be substantially parallel to a direction of the particle stream in an alignment region of the conduit. The aligned elongated particles are ejected from the conduit and impact the biological tissue.

Alignment of elongated particles in a particle delivery device

First and second chiplets are positioned along a surface to respectively cover first and second electrodes. The first electrode is activated to cause an attraction force between the first electrode and the first chiplet. The second electrode is deactivated allowing the second chiplet to rotate on the surface. While the first electrode is activated and the second electrode is deactivated, a rotation field is applied to cause the second chiplet to be oriented at a desired orientation angle, the first chiplet being prevented from rotating by the attraction force.

Micro assembler with fine angle control

An electronic assembly and methods of making the assembly are disclosed. The electronic assembly includes a substrate with an elastic member having an intrinsic stress profile. The elastic member has an anchor portion on the surface of the substrate; and a free end biased away from the substrate via the intrinsic stress profile to form an out of plane structure. The substrate includes one or more spacers on the substrate. The electronic assembly includes a chip comprising contact pads. The out of plane structure on the substrate touches corresponding contact pads on the chip, and the spacers on the substrate touch the chip forming a gap between the substrate and the chip.

Spacers formed on a substrate with etched micro-springs

System and method that allow utilize machine learning algorithms to move a micro-object to a desired position are described. A sensor such as a high speed camera or capacitive sensing, tracks the locations of the objects. A dynamic potential energy landscape for manipulating objects is generated by controlling each of the electrodes in an array of electrodes. One or more computing devices are used to: estimate an initial position of a micro-object using the sensor; generate a continuous representation of a dynamic model for movement of the micro-object due to electrode potentials generated by at least some of the electrodes and use automatic differentiation and Gauss quadrature rules on the dynamic model to derive optimum potentials to be generated by the electrodes to move the micro-object to the desired position; and map the calculated optimized electrode potentials to the array to activate the electrodes.

System and method for machine-learning enabled micro-assembly control with the aid of a digital computer

Disclosed are methods and systems of controlling the placement of micro-objects on the surface of a micro-assembler. Control patterns may be used to cause electrodes of the micro-assembler to generate dielectrophoretic (DEP) and electrophoretic (EP) forces which may be used to manipulate, move, position, or orient one or more micro-objects on the surface of the micro-assembler. The control patterns may be part of a library of control patterns.

Method of controlling the placement of micro-objects on a micro-assembler

Control loop latency can be accounted for in predicting positions of micro-objects being moved by using a hybrid model that includes both at least one physics-based model and machine-learning models. The models are combined using gradient boosting, with a model created during at least one of the stages being fitted based on residuals calculated during a previous stage based on comparison to training data. The loss function for each stage is selected based on the model being created. The hybrid model is evaluated with data extrapolated and interpolated from the training data to prevent overfitting and ensure the hybrid model has sufficient predictive ability. By including both physics-based and machine-learning models, the hybrid model can account for both deterministic and stochastic components involved in the movement of the micro-objects, thus increasing the accuracy and throughput of the micro-assembly.

System and method for machine-learning-based position estimation for use in micro-assembly control with the aid of a digital computer

The system and method described allow for real-time control over positioning of a micro-object. A movement of at least one micro-object suspended in a medium can be induced by a generation of one or more forces by electrodes proximate to the micro-object. Prior to inducing the movement, a simulation is used to develop a model describing a parameter of an interaction between each of the electrodes and the micro-object. A function describing the forces generated by an electrode and an extent of the movement induced due to the forces is generated using the model. The function is used to design closed loop policy control scheme for moving the micro-object towards a desired position. The position of the micro-object is tracked and taken into account when generating voltage patterns in the scheme.

System and method for voltage-based real-time micro-object position control with the aid of a digital computer

Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

Apparatus for controlling the placement of micro-objects on a micro-assembler

A system includes a separation tool that separates a carrier wafer to form a plurality of chiplet carriers. The carrier wafer having sheets of thin film material attached. A sensor and processor of the system determine an orientation of the portions of the sheets of thin film material relative to the chiplets to determine a mapping therebetween. A fluid carrier of the system places the chiplet carriers on an assembly surface in a disordered pattern. The system includes a micro assembler that arranges the chiplet carriers from the disordered pattern to a predetermined pattern based on the mapping. A carrier of the system transfers the portions of the thin film material from the chiplet carriers to a target substrate.

Method and system for mass assembly of thin-film materials

Growing community of inventors

Fremont, CA, United States of America

Eugene Michael Chow