Asml Netherlands B.v.

Eugene Maria Brinkhof

Johannes Wilhelmus Damen

Jan Bex

Nicolaas Ten Kate

Raymond Wilhelmus Louis Lafarre

Yogesh Pramod Karade

Anko Jozef Cornelus Sijben

Robertus Adolphus Maria Kuipers

Vasco Francisco Bovée

Joannes Hendricus Maria Van Oers

An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.

Electrostatic clamp, lithographic apparatus, and device manufacturing method

A method of manufacturing a substrate holder for use in a lithographic apparatus, the method including providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate, providing a carrier surface adjacent the main body surface, and forming a conductive layer on at least part of the main body surface and an integral part on at least part of the carrier surface.

Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

A lithographic apparatus includes a heat transfer assembly configured to temperature control at least a portion of the lithographic apparatus. The heat transfer assembly includes a printed circuit board, and a plurality of heat transfer elements. The printed circuit board and the plurality of heat transfer elements are configured to be attached to the portion of the lithographic apparatus. The plurality of heat transfer elements are separate from and are electrically coupled to the printed circuit board.

Heat transfer assembly, lithographic apparatus and manufacturing method

Growing community of inventors

Weert, Netherlands

Eugene Maria Brinkhof