Sovonics Solar Systems

Eugene Fournier

Joachim Doehler

Apparatus for microwave energized glow discharge deposition of materials, onto a substrate including electronic structures having a plurality of layers of amorphous semiconducting alloys of varying conductivity types. The apparatus includes at least one deposition chamber in which a novel antenna coupled to a source of microwave energy to form a microwave energy excited glow discharge plasma is disposed. The antenna has coaxial conductors approximately one half wavelength long that are electrically connected to each other at their respective distal ends. A multiple integer of one half wavelength of a coaxial transmission line coupling the antenna energy and source may also form part of the antenna. The respective outer conductors of the transmission line and antenna are separated by an electrically small gap, but the respective center conductors are electrically connected. The apparatus may provide for continuous glow discharge deposition on a moving substrate web that passes through a number of deposition chambers for deposition of various layers to form a desired electronic device structure. Each chamber may include an antenna according to the invention.

Apparatus for microwave glow discharge deposition

An apparatus for manufacturing photovoltaic devices of the type including a plurality of layers of semiconductor materials deposited onto a substrate includes a plurality of deposition chambers, each chamber arranged to deposit a respective one of the layers of semiconductor materials onto the substrate as the substrate is advanced therethrough. At least one of the deposition chambers is coupled to a source of microwave energy to form a microwave energy excited glow discharge plasma within the at least one deposition chamber for depositing at least one of the layers of semiconductor material onto the substrate from the microwave energy excited glow discharge plasma within the at least one deposition chamber. Also disclosed is an assembly for depositing a material onto a substrate from a microwave energy excited plasma. The assembly includes a deposition chamber, a source of microwave energy, and an antenna extending into the chamber and coupled to the microwave energy source. The antenna includes an outer sheath formed from a conductive material, an inner conductor extending within and electrically insulated from the outer sheath, and a slot within the outer sheath. The assembly also includes a new and improved feed-through for the antenna permitting the antenna to extend into the chamber while establishing a vacuum seal between the chamber and the antenna.

Growing community of inventors

Garden City, MI, United States of America

Eugene Fournier