Honeywell International Inc.

Honeywell G.m.b.h.

Honeywell Interantional Inc.

Eugen I Cabuz

Cleopatra Cabuz

Tzu-Yu Wang

Burgess R Johnson

Robert D Horning

Thomas R Ohnstein

Ryan Supino

Daniel W Youngner

Robert Compton

Paul Eugene Bauhahn

David J Zook

Ulrich Bonne

Aravind Padmanabhan

John T Adams

Sybrandus B V Munsterhuis

Peter L Reutiman

Stephen R Shiffer

Gerrit Jan Baarda

Stephen J Kemp

Mihai Gologanu

Jay G Schwichtenberg

Virgil Claudiu Banu

Peter Reutiman

Aravind Padmannbhan

A method for fabricating a vibratory structure gyroscope is provided herein. An annular cavity is formed in a first surface of a substrate, the annular cavity defining an anchor post located in a central portion of the annular cavity. A bubble layer is formed over the first surface of the substrate and over the annular cavity. The substrate and the bubble layer are heated to form a hemitoroidal bubble in the bubble layer over the annular cavity. A sacrificial layer is deposited over the hemitoroidal bubble of the bubble layer and an aperture is formed in the sacrificial layer, the aperture disposed over the anchor post in the annular cavity. A resonator layer is deposited over the sacrificial layer and the sacrificial layer between the bubble layer and the resonator layer is removed.

Hemitoroidal resonator gyroscope

Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Two degree of freedom dithering platform for MEMS sensor calibration

Systems and methods for two degree of freedom dithering for micro-electro-mechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.

Systems and methods for an encoder and control scheme

One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.

Methods for determining one or more operating parameters for a timing protocol of a microfluidic circuit are provided. In some embodiments, wet out times are measured for certain flow channels, and start times, flow rates and/or other parameters are calculated so that the various fluids in the microfluidic cartridge arrive at certain locations at a desired time and/or in a desired sequence. To help compensate for process variations, one or more fluidic process monitor components/structures may be fabricated along with the functional components/structures of a microfluidic cartridge. Test may be performed on the process monitor components/structures to help identify process variations in the particular microfluidic cartridge at hand. By using the process monitor data, the timing protocol for a particular microfluidic cartridge may be made more accurate.

Method and apparatus for determining one or more operating parameters for a microfluidic circuit

A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.

Piezoresistive pressure sensor

An asymmetric micro pump may be adapted to provide a greater fluid compression between input and output ports of the micro pump, as well as increased flow rate due to higher actuation frequency. In some instances, asymmetric dual diaphragm micro pumps may be combined into assemblies to provide increased pressure build, improved pumping volume, or both, as desired.

Asymmetric dual diaphragm pump

A valve is provided that can selectively change the size of a flow channel in a valve in order to modulate the fluid flow through the valve. In one illustrative embodiment, the valve includes a housing that defines a cavity, with an inlet and an outlet extending into the cavity. A diaphragm is positioned in the cavity, where at least part of the diaphragm defines at least part of the fluid path. One or more electrodes are fixed relative to the diaphragm, and one or more electrodes are fixed relative to the housing such that the diaphragm can be electrostatically actuated to modulate the fluid flow through the valve.

Microfluidic modulating valve

MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis.

Force rebalancing and parametric amplification of MEMS inertial sensors

A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the first and second chambers. There may be a first electrode on the diaphragm and a second electrode on an inside surface of the second chamber. The diaphragm may have first and second positions, or numerous variable positions. Applying a voltage across the electrodes may electrostatically move the diaphragm to the second position during which the outlet is at least partially opened for fluid communication with the inlet, the orifice is closed and the diaphragm is stopped in the second position by a cushioning fluid pressure in the second cavity to prevent pull-in. Removing the voltage from the electrodes may let the diaphragm return to the first position, open the orifice and close the outlet.

Mesovalve modulator

An apparatus having a disposable cytometer cartridge containing pumps, pressure chambers, reservoirs, flow sensors, flow channels, and microfluidic circuits with fluid operations on the cartridge. The circuits may include mesopumps and mesovalves embedded in the chip, card or cartridge. The apparatus may have multiple detecting, analyzing and identification capabilities of blood or other fluids of interest. The sample to be tested may be entered in the disposable microfluidic cartridge which in turn is insertable in a hand-holdable or portable cytometer instrument. This apparatus may have significant application in biological warfare agent detection, water analyses, environmental checks, hematology, and other clinical and research fields.

Flow control system of a cartridge

A pressure sensor having a predetermined chamber dome angle with an electrode. A hole is located in the top to provide pressure readings and the bottom has an input port. A primary diaphragm is coated on both sides with an electrode and an insulator. A secondary diaphragm is coated on the side which faces the primary diaphragm. Offset holes are made in the two diaphragms which permits pressure equalization during self calibration. Both diaphragms are initially energized to seal the gage volume, and then the secondary diaphragm is used to self calibrate using a known pressure.

Self calibrating dual diaphragm pressure sensor

A microvalve assembly that can help protect a microvalve or an assembly of microvalves from the environment. Such a microvalve assembly may be mechanically assembled, without the use of adhesives and/or other materials that might out-gas and/or otherwise reduce the performance of the electrostatically actuated devices contained therein. In particular, a microvalve assembly can include a base fixture, a clamp fixture that is configured to be attached to the base fixture, and an electrostatically actuated microvalve that is disposed between the base fixture and the clamp fixture. The clamp fixture may be mechanically secured to the base fixture.

Growing community of inventors

Edina, MN, United States of America

Eugen I Cabuz