Kabushiki Kaisha Toshiba

Etsuo Fukuda

Shoichi Harakawa

Makoto Ikeda

Hiroshi Nanami

Shinichi Hohkibara

Hidehiro Okutani

Yuichi Satoguchi

Yuichiro Ozaki

Tomiko Takano

Kazuyuki Miura

Masayoshi Tazawa

A semiconductor processing process control system comprising a skip judgment request receiving section for receiving a request for judgment as to whether a process can be skipped or not. A skip judgment yes/no section searches for a judgment plug-in corresponding to the process to be skipped and a judgment execute section activates the judgment plug-in to make a judgment as to whether the process can be skipped or not on the basis of skip judgment logic in the plug-in. A skip execute section effects skipping of the process if the judgment determines that the process can be skipped.

Semiconductor processing process control system and its control method

A semiconductor processing process control system includes a process controller main body ( ) for controlling processes for semiconductor processing independently from semiconductor processing devices and contents of intended processing, and a control variable computation programs ( ) for obtaining control conditions for semiconductor processing adaptive to semiconductor processing devices and contents of intended processing. The control variable computation programs ( ) are used by plugging necessary one of them into the process controller main body ( ). When there is any change in semiconductor processing device and content of processing, the system can cope with such changes by merely modifying the control variable computation programs ( ). Therefore, the system flexibly, quickly copes with changes in process for processing, computing method of control variables and processing device.

A production/manufacturing planning system is provided with a production planning planner and a manufacturing planning scheduler . The production planning planner makes the production planning for the whole factory, and the manufacturing planing sheduler makes the manufacturing planning schedule for each of manufacturing lines on the basis of the production planning for the whole factory. Thus, it is possible to more precisely make the production planning and manufacturing planning than that in conventional systems.

Production/manufacturing planning system

A production system has a plurality of production apparatuses, a conveyer which conveys to each production apparatus at each lot, a lot management computer which controls the degree of progress of the production process in each lot, apparatus management computers which control each of production apparatuses, and an intensive management computer which detects the degree of progress of the production process in each lot and operating state of each production apparatus. User interface sections are connected to the apparatus management computer and the intensive management computer, respectively. The user interface sections comprise display apparatuses, respectively. In the screen of the display apparatuses, operating state of each production apparatus and the degree of progress of the production process of the lot in each production apparatus are displayed. In the screen of the display apparatus of the user interface section, operating state of the corresponding production apparatus and the degree of progress of the production process of the lot in the corresponding production apparatus is displayed.

Production system for manufacturing semiconductor devices by lot

A production scheduling management system includes: a long-range production scheduling unit that receives long-range production scheduling information including at least information on a delivery date of each lot, produces a lot processing schedule based on the delivery date of each lot, and outputs a long-range production schedule; a short-range production scheduling unit that receives the long-range production schedule and short-range production scheduling information, produces a short-range schedule of lot processing so as to fulfill the long-range production schedule, and outputs a short-range production schedule; and a work scheduling unit that receives the short-range production schedule and work scheduling information, produces a work schedule so as to fulfill the short-range production schedule, while taking account of conditions of each machine and conditions of each lot, and generates work schedule.

Production scheduling management system, and method of managing production scheduling

A process flow, in which wafer processing conditions are described for forming a semiconductor through a plurality of processes, is formed for each lot in one type. A wafer processing is formed for each lot in one type of semiconductor in accordance with the process flow. When a different processing condition should be described according to a wafer in the lot in a certain process of the process flow, the process flow forming includes forming a plurality of different flows in that process by defining division/combination locations from a parent flow. When a faulty processing occurs in the wafer processing in a certain process, the process flow associated with that process is reformed, and a reprocessing is performed in accordance with the reformed process flow.

Semiconductor product manufacturing execution system and semiconductor

A system for automatically producing semiconductor products has a section for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line; a section for simulating the producing of semiconductor products according to the process flow; a section for feeding a result of the simulation back to the process flow preparation section, which optimizes the process flow according to the simulation result; and a section for producing semiconductor products according to the optimized process flow.

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Yokohama, Japan

Etsuo Fukuda