Olympus Corporation

Etsuko Omura

Katsuhiro Wakabayashi

Hideo Adachi

Yukihiko Sawada

Akiko Mizunuma

Miyuki Murakami

Takuya Imahashi

Kiyoshi Nemoto

Shuji Otani

Naomi Shimoda

Kozaburo Suzuki

Yoshiyuki Okuno

Katsuhiro c/o Olympus Corporation Wakabayashi

Yoshiyjki c/o Olympus Corporation Okuno

Miyuki c/o Olympus Corporation Murakami

Shuji c/o Olympus Corporation Otani

Kiyoshi c/o Olympus Corporation Nemoto

Takuya c/o Olympus Corporation Imahashi

Naomi c/o Olympus Corporation Shimoda

Hideo c/o Olympus Corporation Adachi

Kozaburo c/o Olympus Corporation Suzuki

Yukihiko c/o Olympus Corporation Sawada

Akiko c/o Olympus Corporation Mizunuma

It becomes possible to obtain high sound pressure in a high frequency domain by a capacitive ultrasonic transducer which comprises a membrane on which one electrode is formed, a cavity constructed in its backface, and a substrate on which these are mounted and supported and on whose surface an electrode is provided, on a surface in an ultrasonic transmission and reception side, characterized in that the membrane comprises tow or more layers, and at least one layer of them comprises a high dielectric constant film.

Capacitive ultrasonic transducer, production method thereof, and capacitive ultrasonic probe

A capacitive micromachined ultrasonic transducer having an ultrasonic wave transmission/reception surface formed by arranging a plurality of transducer cells each of which includes a membrane having a first electrode and a supporting film for supporting the first electrode, and also includes a second electrode arranged being opposite to the first electrode and being spaced apart from the first electrode at a prescribed interval, wherein: the transducer cells are arranged on the basis of resonant frequencies of the transducer cells.

Capacitive micromachined ultrasonic transducer

Growing community of inventors

Saitama, Japan

Etsuko Omura