Hamamatsu-Photonics K.k.

Etsuji Ohmura

Naoki Uchiyama

Kenshi Fukumitsu

Fumitsugu Fukuyo

Masayoshi Kumagai

Kazuhiro Atsumi

An object to be processedis irradiated with laser light L with a standard pulse waveform, so as to form a molten processed region, which has a larger size in the thickness direction of the objectand is easy to generate a fracturein the thickness direction of the object, within a silicon wafer, and with laser light L with a retarded pulse waveform, so as to form a molten processed region, which has a smaller size in the thickness direction of the objectand is hard to generate the fracturein the thickness direction of the object, within a silicon wafer.

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Hirakata, Japan

Etsuji Ohmura