Iwatani International Corporation

Horiba, Ltd.

Etsuji Kawaguchi

Koichiro Matsuda

Toshiya Itoh

Michio Sugata

Shoichiro Togitani

Mitsunori Irie

Masayoshi Yani

In a cryostat vacuum chamber encompassing a refrigerator and a sample table cooled by the refrigerator, a heater is provided for controlling a temperature of the sample table, and the refrigerator is also provided with separate heaters.

Cryostat vacuum chamber

A device for preventing evaporation of liquefied gas in a liquefied gas reservoir used to cool an EDS detector of an electron microscope or the like is disclosed. A cold head of a cryogenic refrigerator is disposed so as to fit an opening of the top of the liquefied gas reservoir and moreover a temperature measuring instrument or a level gauge is disposed within the liquefied gas reservoir so that the cryogenic refrigerator is automatically operated depending on the temperature within the liquefied gas reservoir or on change in the liquid level of liquefied gas. In the manner vaporized gas is condensed and reliquefied, thus suppressing wasteful dissipation of vaporized gas.

Device for preventing evaporation of liquefied gas in a liquefied gas

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Otsu, Japan

Etsuji Kawaguchi