Commissariat a L'energie Atomique Et Aux Energies Alternatives

Etienne Fuxa

Jean-Jacques Yon

A bolometer type detection structure for detecting electromagnetic radiation is provided, including a MOSFET transistor associated with a first absorbing element in order to detect an increase in temperature of the first absorbing element during absorption of the electromagnetic radiation, the transistor including at least one first and at least one second zones, at least one third zone separating the first and second zones from each other, and at least one first gate electrode arranged to bias the third zone, the first gate electrode including at least one first metal portion forming the first absorbing element, the first metal portion having a thickness Esatisfying: where &#x3c1; is a resistivity of a metal material forming the at least one first metal portion. A process for manufacturing the structure is also provided.

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Pommiers, France

Etienne Fuxa