Centre National De La Recherche Scientifique

Vmicro

Universite Lille-1

Université De Lille 1 - Sciences Et Technologies

Estelle Mairiaux-Mage

Marc Faucher

Benjamin Walter

A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.

Micromechanical sensor with optical transduction

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

Growing community of inventors

Villeneuve d'Ascq, France

Estelle Mairiaux-Mage