Von Ardenne Anlagentechnik Gmbh

Von Ardenne Asset Gmbh &co. Kg

Erwin Zschieschang

Harald Gross

Georg Laimer

Jens Melcher

Christoph Haeusler

Robert Kuenanz

Bjoern Hornbostel

In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.

Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.

Substrate treatment installation

Growing community of inventors

Dresden, Germany

Erwin Zschieschang