Leybold Aktiengesellschaft

Balzers Und Leybold Deutschland Holding Ag

Tüv Industrie Service Gmbh

Erwin Winter

Manfred Schuhmacher

Andreas Sauer

Dietmar Marquardt

Gunter Brauer

Martin Bahr

Christian Zauner

Pole shoes (3, 4, 5) of magnetically conductive material are provided inside of a first tubular target (2). Outside the target (2), a magnetic flux guide element (7) is provided, which has three pole shoes (8, 9, 10) directed toward the hollow body (1), which are connected to each other by magnets (12, 13). These magnets (12, 13) transmit the magnetic field through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across narrow gaps (6, 11).

Apparatus for coating a substrate

Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.

Apparatus for applying thin layers to a substrate

Growing community of inventors

Hanau, Germany

Erwin Winter