Kernforschungszentrum Karlsruhe Gmbh

Kernforschungszentrum Karlsruhe Gesellschaft MIT Beschrankter Haftung

Kernforschungszentrum Kalrsruhe Gmbh

Erwin W Becker

Wolfgang Ehrfeld

Dietrich Munchmeyer

Peter Hagmann

Wilhelm Bier

Gunther Krieg

Peter Bley

Frank S Becker

Asim Maner

Harald Steinhaus

Wolfgang Fritz

Hans Betz

Anton Heuberger

A spinning nozzle plate having nozzle capillaries is produced by depositing a layer 11 of a material whose characteristics can be changed by high-energy radiation (resist material) on a galvanic electrode 12. After resist layer 11 is irradiated in a predetermined pattern and after resist material is selectively removed by a treatment which utilizes the different material characteristics resulting from the irradiation, columns of resist material remain on galvanic electrode 12 to serve as negatives 21 of the nozzle capillaries. A galvanic layer 31 which encloses the negatives 21 of the nozzle capillaries is then produced on the galvanic electrode 12. Then the galvanic layer 31 is levelled and the negatives 21 are removed, as is the galvanic electrode 12. The process is particularly useful for producing spinning nozzle plates having nozzle capillaries with profiles of a special shape, essentially if the cross-sectional dimensions of the nozzle capillaries are small.

Method for producing a spinning nozzle plate

Method for producing a plurality of deformable connecting elements for electrically joining microelectronic components. The method includes irradiating with high energy radiation portions of a plate-like member composed of material having a material characteristic which is changed by such high energy radiation, each portion having dimensions corresponding to those of a connecting element; utilizing the changed material characteristic of the material of the irradiated portions to remove such material from the irradiated portions to produce a plate-like mold containing a plurality of mold structures each defining a shape corresponding to a connecting element at a given location of said member, each such mold structure having lateral dimensions and a height dimension which is a multiple of the smallest lateral dimension; filling the mold structures with metal by electroplating the metal into such mold structures to produce metallic connecting elements; fixing the connecting elements to a microelectronic component; and removing the plate-like mold.

Method for producing connecting elements for electrically joining

A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed. The mold plate itself may be produced by depositing a layer of resist material on a further galvanic electrode, irradiating the resist layer in a predetermined pattern using high energy radiation, selectively removing portions of the irradiated resist layer to produce negatives that are connected to the further galvanic electrode, depositing a further galvanic layer, and removing the negatives. These techniques permit economical production of spinning nozzle plates, particularly plates having nozzle capillaries with specially shaped cross sections and small critical dimensions.

Method for producing spinning nozzle plates

In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.

Method for producing a plurality of plate shaped microstructured metal

A method for producing a multichannel plate containing metal dynodes and having a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:

Layered multichannel metal plates for image amplifiers

A method for producing a multichannel plate containing a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:

Method for producing multichannel plates

A process for the separation of light additive gas at the end of and/or at the location of the change in stage sizes in a separating nozzle cascade which is operated with a mixture of gaseous or vaporous substances to be separated. The separation of the light additive gas is effected by using a separating nozzle stage. A double deflection separating nozzle is employed as the separating nozzle stage.

Method for separating light additive gas in separating nozzle cascades

Method for producing a separating nozzle element including a separating body and terminal plates, for the separation of a gaseous or vaporous mixture, wherein the separating body comprises separating structures which penetrate the separating body and define separating chambers and gas conduits, and the terminal plates are provided with channels for the intake and discharge of gas streams. A mold layer is produced which contains negative outlines of the separating structures. Thereafter, the negative outlines of the mold layer are filled with a structure material which is compatible with the gaseous or vaporous mixture to be separated to form the separating structures. The mold layer containing the negative outlines of the separating structure is produced by shaping the mold layer from a reusable tool provided with the positive outlines of the separating structures.

Method for producing separating nozzle elements

A separating nozzle element composed of a separating body and two cover plates between which the body is interposed, the nozzle element being used for the separation of gaseous or vaporous mixtures, is produced by providing a layer of a material whose ability to be removed from the layer can be altered by irradiation, the thickness of the layer being approximately equal to the thickness of the separating body, irradiating the layer, starting at one surface, with radiation which has a penetration depth into the material of the layer which is less than the thickness of the layer, in a pattern corresponding to the cross section of the separating body structure, and removing from the layer material which is more easily removable as a result of the irradiation, to thereby permit the radiation to penetrate to greater distances from the one surface, while continuing the removal of material until the entire thickness of the layer has been subjected to radiation and removal, to form a mold of the separating body. The mold is then filled with material constituting the separating body, whereafter the mold is removed.

Method for producing separating nozzle elements for the separation of

A separating nozzle element composed of a separating body and end plates enclosing the body, for separating components of gaseous or vaporous mixtures, the separating body being provided with separating structures which delimit separating chambers and gas conduits and the end plates being provided with channels for supplying gas to, and removing gas streams from, the separating chambers and conduits, in which the separating body is produced in successive contiguous layers by carrying out the following sequence of steps a plurality of times until a given separating body thickness is achieved: providing a mold layer; irradiating selected portions of the layer with radiation in a spatial pattern corresponding to the separating structures to render only selected regions of the layer which correspond to the separating structures removable in a predetermined manner; removing the selected regions; and filling the spaces thus created in the layer with a material which is compatible with the gaseous or vaporous mixture whose components are to be separated, in order to form a laminar portion of the separating structures, and after the desired thickness is achieved, removing the remaining material of the mold layers.

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Karlsruhe, Germany

Erwin W Becker