Fei Comapny

Erwin Fernand De Jong

Peter Christiaan Tiemeijer

Sorin Lazar

Rudolf Geurink

An imaging system for directing a flux of charged particles transmitted through a specimen onto a spectroscopic apparatus, wherein the flux is dispersed by a dispersing device into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis. An adjustable aperture device defines an aperture in a path of the array so as to select a subset of the array to be admitted to a detector, which aperture is delimited in a dispersion direction perpendicular to the propagation axis to allow independent adjustment of both of: a width of the aperture parallel to the dispersion direction; and a position of a center of the aperture relative to the propagation axis.

Spectroscopy in a transmission charged-particle microscope

A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:

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Best, Netherlands

Erwin Fernand De Jong