Micron Technology Incorporated

Ernest E Marks

Scott E Moore

Willard L Hofer

Bryan J Ludwig

Nathan P Lee

Ross H Burck

David A Cathey

L Brian Dunn

Leo B Jurica

Loyal R Gibbons

Jay D Barnett

A detachable locking device is described which consists of a pair of standard box end wrenches with shortened handles having integral ears on the ends of the handles with openings therethrough. The wrenches are designed to be retrofittably placed behind the respective connecting nuts on the line termination point adapter assemblies which are to be joined. The preliminary connection and seal are made using conventional means and the connecting nuts are torqued to near their optimum value. The wrench heads of the locking device are then positioned on the nuts so that a connecting bolt can be passed through the openings in the ears on the handles, a nut attached thereto and then tightened to hold and secure the connecting nuts together and prevent the nuts from loosening or seal leaking during the operation of the fluid transmission line.

Fluid line nut locking device

A removable clamping device is described which uniformly and effectively joins two fluid transmission lines at their normal termination points, using standard adapter flanges and removable seals and generally 'C' shaped clamps having narrow slots therein which are designed to just slip over the smallest diameter of the adapter or fluid line and bear against the respective connecting flanges. The two clamps are held together by threaded bolts which are spaced equally about the clamps and which may be tightened or loosened without exerting undesirable rotational torque about the long axis of the fluid line connection, thus avoiding possible breakage and leakage.

Fluid line clamp

The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer grips which hold the wafers until the wafer platform is lowered and a second wafer about is in position to receive the wafers. The wafer platform is actuated by the negative pressure applied to alternating sides of a stage which divides a sealed cabinet into two portions. A vacuum is applied to alternating sides of the stage, while ambient air is introduced into the other side, causing the stage to move in the direction of lower pressure. The platform is affixed to the stage on at least two points.

Vacuum operated wafer transfer apparatus

A detachable locking device is described which consists of a pair of standard box end wrenches with shortened handles having integral ears on the ends of the handles with openings therethrough. The wrenches are first placed behind the respective connecting nuts on the line termination point adapter assemblies which are to be joined. The preliminary connection and seal is then made using conventional methods and the connecting nuts are torqued to near their optimum value. The box end wrenches of the locking device are then positioned on the nuts so that a connecting bolt can be passed through the openings in the ears on the handles, a nut attached thereto and then tightened to hold and secure the connecting nuts together and prevent the nuts from loosening or seal leaking during the operation of the fluid transmission line.

Method of transferring wafers using vacuum

Improvements to an integrated circuit wafer rinsing and washing machine which include a streamlined housing for low turbulence air flow, improved rear maintenance capability, improved wafer carriers, foot operated switches and improved rotating part fastening means.

Wafer rinser/dryer

Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.

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Boise, ID, United States of America

Ernest E Marks