Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ebara Corporation (1 from 2,512 patents)
1 patent:
1. 12033847 - Cleaning module, substrate processing apparatus including cleaning module, and cleaning method