Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Universitaet Duisburg-Essen

Erik Verheyen

Holger Vogt

Dirk Weiler

Tobias Kleinfeld

Described is an integrated vertical structure for infrared sensors, Peltier cooling, and thermoelectric generator applications consisting of a thermally insulating layer which is kept at a distance to a substrate by at least two spacers. In addition, the spacers have conductor structures which serve as thermoelectric elements. A method realizes manufacturing the integrated thermoelectric structure, a method realizes the operation of the integrated thermoelectric structure as a detector, a further method realizes the operation of the integrated thermoelectric structure as a thermoelectric generator, and a method realizes the operation of the integrated thermoelectric structure as a thermoelectric Peltier element.

Integrated thermoelectric structure, method for manufacturing an integrated thermoelectric structure, method for operating same as a detector, thermoelectric generator and thermoelectric Peltier element

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Duisburg, Germany

Erik Verheyen