Asml Netherlands B.v.

Carl Zeiss Smt Gmbh

Erik Roelof Loopstra

Alexander Petrus Josephus Van Lankvelt

Hubertus Renier Maria Van Lierop

Ahmet Levent Avsar

Galip Tuna Turkbey

A vibration isolator () for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment () formed with a rigid base structure (), which base structure has an opening () covered with a flexible membrane () having an inner surface () facing into the gas compartment and an outer surface () facing in the opposite direction, a support member () for supporting the payload, which support member is arranged in contact with the outer surface () of the membrane, and a clamping member () arranged at the inner surface () of the membrane, wherein the support member and the clamping member form a clamping system (), which system includes at least one magnetic element () effecting the membrane to be pressed against the support member.

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Ederheim Huernheim, Germany

Erik Roelof Loopstra