Asml Netherlands B.v.

Erik Mathijs Maria Crombag

Everhardus Cornelis Mos

Roy Werkman

Cornelis Johannes Henricus Lambregts

Jeroen Van Dongen

Theo Wilhelmus Maria Thijssen

Hans Marinus Struijs

Maria Helena Schut

Erwin Riemens

Menno Meeldijk

Ajith Ganesan

Ivo Matteo Leonardus Weijden

Ruud Rudolphus Johannes Catharinus De Wit

A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.

Method for evaluating control strategies in a semiconductor manufacturing process

A method of displaying a plurality of graphical user interface elements, each graphical user interface element representing a step in a measurement design, setup and/or monitoring process and each graphical user interface element enabling access by the user to further steps in the measurement design, setup and/or monitoring process for the associated step of the graphical user interface element, and displaying an indicator associated with one or more of the plurality of graphical user elements, the indicator indicating that a step in the measurement design, setup and/or monitoring process is not completed and/or that a key performance indicator associated with a step in the measurement design, setup and/or monitoring process has passed a threshold.

Method and apparatus for inspection and metrology

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Eindhoven, Netherlands

Erik Mathijs Maria Crombag