Applied Materials, Inc.

Erik Jan Hilda Collart

Amir Hamed Al-Bayati

Adrian John Murrell

Bernard F Harrison

David George Armour

Simon Herbert Povall

Paul A Burfield

Andrew Holmes

Drew Arnold

Chris James Burgess

An ion beam generation apparatus comprising an ion source ( ) for generating ions, and a tetrode extraction assembly ( ) comprising four electrodes for extracting and accelerating ions from the ion source. The extraction assembly comprises a source electrode ( ) at the potential of the ion source, an extraction electrode ( ) adjacent to the source electrode to extract ions from the ion source ( ), a ground electrode ( ), and a suppression electrode ( ) between the extraction electrode and the ground electrode. Each electrode has an aperture to allow the ion beam to pass therethrough. The gap between the extraction ( ) and suppression ( ) electrodes is variable in the direction of ion beam travel.

Ion beam generation apparatus

Growing community of inventors

West Sussex, United Kingdom

Erik Jan Hilda Collart