Siltronic Ag

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag

Other

Wacker-chemitronic Gesellschaft Fur Elektronik-grundstoffe Mbh

Crystal Growing Systems Gmbh

Wacker Siltronic Gesellschaft F{umlaut Over (u)}r Halbleitermaterialien Ag

Wacker Siltronik Gesellschaft Fur Halbleitermaterialien Ag

Erich Tomzig

Wilfried Von Ammon

Janis Virbulis

Paul Fuchs

Dieter Knerer

Axel Vonhoff

Burkhard Altekrüger

Yuri Gelfgat

Stefan Henkel

Werner Zulehner

Reinhard Wolf

Wolfgang Hensel

Leonid Gorbunov

Lenoid Gorbunov

Yu M Gelfgat

A pulling apparatus and a method with which especially heavy crystals () can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck () of the crystal () has an enlargement () beneath which extends the support device. This device includes latches (), which are moved from a resting position into an operating position in which the latches () extend beneath the enlargement (). Each latch () is supported on the base body such that it is swivellable about a pivot axis () and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (), is located on the other side of the pivot axis (). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (). The actuation of the latches () takes place with actuation means disposed stationarily in the apparatus.

Crystal pulling apparatus and method for the production of heavy crystals

A process for producing a silicon single crystal is by pulling the single crystal from a silicon melt which is contained in a crucible with a diameter of at least 450 mm, above which a heat shield is arranged. The single crystal being pulled has a diameter of at least 200 mm. The silicon melt is exposed to the influence of a traveling magnetic field which exerts a substantially vertically oriented force on the melt in the region of the crucible wall. There is also an apparatus which is suitable for carrying out the process.

Process and apparatus for producing a silicon single crystal

A process and device for the production of a single crystal of semiconductor material is by pulling the single crystal from a melt, which is contained in a crucible and is heated by a side heater surrounding the crucible. The melt is additionally heated, in an annular region around the single crystal, by an annular heating device which surrounds the single crystal and is positioned above the melt.

Process and device for the production of a single crystal

The invention relates to a process for melting semiconductor material in a crucible which is located in a container, and is enclosed by a fixed heating device. The invention also relates to a heating device which is suitable for carrying out the process. The process is one wherein a heater of a displaceable heating device is lowered from a lock chamber above the container through an open shut-off valve into the container in the direction of the semiconductor material, and the semiconductor material is melted using the fixed heating device and the lowered heater. The heater is then raised back out of the container into the lock chamber after the semiconductor material has been melted. A door is provided in the lock chamber to allow the displaceable heater to be removed after the semiconductor material has been melted.

Process and heating device for melting semiconductor material

A process for producing a silicon single crystal by the Czochralski method, utilizes a heater which is intended for heating a silicon-filled crucible and is arranged below the crucible. The process has energy delivered to the melt at least some of the time inductively using a coiled heater arranged under the crucible. The heater is in the form of a wound coil.

Process for producing a silicon single crystal, and heater for carrying

A process for the growth of a single crystal from semiconductor material by the Czochralski method, in which the melt is subjected to the influence of a magnetic field during the crystal growth and the magnetic field is generated by superposing a static magnetic field and an alternating magnetic field. An apparatus for carrying out the process, has a magnetic means which comprises two coils which are arranged around a crucible, one coil generating a static magnetic field and the other coil generating an alternating magnetic field.

Process and apparatus for the growth of single crystals

A method and apparatus for pulling single crystals from a melt of semicontor material, in which a monocrystalline seed crystal grows to form a single crystal, the seed crystal being dipped into the melt and raised in a controlled manner in the vertical direction with respect to the melt, while the melt forms a molten pool which is held on a support body only by the surface tension and by electromagnetic forces due to an induction coil. This method includes recharging the melt with semiconductor material in solid or liquid form during the growth of the single crystal.

Method for pulling single crystals

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Burgkirchen, Germany

Erich Tomzig