Balzers Aktiengesellschaft

Erich Kaiser

Eduard Rille

Pius Gr/u/ Nenfelder

In conventional attachments of target plates for cathode sputtering the danger always existed that they will become plastically deformed at the operating temperature and detach from a cooling support. For secure attachment without fastening means on the front side to be disintegrated, the target plate according to the invention presents on its back a cutout (4) in which there is inserted by means of a mechanical spring union, e.g. by means of a lock ring (8), an auxiliary body (6) of a material of higher strength and higher softening point than the material to be disintegrated, which body has a threaded bore (12) for attachment of the target plate on a support (1).

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Vaduz, Liechtenstein

Erich Kaiser