US Government As Represented by the Secretary of the Army

Other

Erich Hafner

John R Vig

Robert J Ney

Ronald P Andres

Milli-Kelvin temperature control in an air chamber by use of coarse and fine temperature control systems, and through the use of structure for handling air flow within the chamber. The coarse control system provides enough heating or cooling power to hold the chamber temperature at a value near, but below, the desired operating temperature, thus leaving a small differential to be made up by the fine control loop. The coarse control has a fairly large thermal time constant (in the order of tens of seconds). The fine control loop has a very fast response time (in the order of fractional seconds). This fast response time is achieved by the use of a heater having minimal thermal mass, a fast response sensor, and a high precision controller. Air circulation within the chamber is forced by an in-line assembly of a number of high volume blowers, all having a common shaft, driven by a constant speed motor. The formation of laminar flow patterns, with their tendency to spontaneous shift in the patterns, is prevented by the use of a limited number of deflectors, i.e. small metal plates placed at nearly right angles to the air stream, fastened to the chamber's ceiling.

Precision temperature test chamber

A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.

Nozzle beam source for vapor deposition

Disclosed is a semi-automatic processing system for the production of components requiring the deposition of metallization and assembly in an oil free ultra-high vacuum environment. The system is comprised of a plurality of interconnected tubular high vacuum chambers for separately performing ultra-violet cleaning, bake out, plating and sealing of, for example, quartz crystal resonator units, in an in-line configuration adapted for continuous cycle processing of components. The major elements of the system include: (a) a belt type transport which is adapted to convey one or more components through the respective chamber and into an adjoining chamber through an intermediate gate valve; (b) manipulators for handling the component parts inside the vacuum chambers; (c) long life highly directional evaporation sources for evaporated metal deposition on selected component parts; and (d) a sealing apparatus for hermetically sealing the components after evaporation without exposure to atmosphere. Each chamber accordingly is separated from all adjoining chambers by gate valves which make each chamber a self contained modular unit that, for ease of servicing, can be removed and/or inserted into the system without affecting the vacuum integrity of the other chambers.

High vacuum continuous cycle fabrication facility

A novel, high-flux source for use in the vapor deposition of electrode maials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The design is based on the theory and technology of nozzle beams. The nozzle beam type source disclosed herein is conceived: (1) to permit large deposition rates with minimum wastage of electrode material; (2) to operate in high vacuum; (3) to emit vapor in a horizontal direction, thereby permitting the use of a pair of sources to plate both sides of a substrate simultaneously; and (4) to operate for extended periods of time without requiring frequent breaking of the vacuum in order to replenish the source. It is estimated that this design can operate at a deposition rate equal or above that of a conventional evaporation-type source with less than one percent of the wastage of electrode material experienced with a conventional source.

Nozzle beam type metal vapor source

Apparatus utilizing single sideband techniques for generating a local oscator signal of high spectral purity which is offset from a relatively wide-band signal generator frequency f.sub.g = 0.8 - 220MHz by a constant IF frequency difference f.sub.o = 46KHz. The output signal is coupled from one of a plurality of phase locked oscillators having overlapping frequency ranges which act as active filters to obtain improved spectral purity.

Phase lock loop controlled offset local oscillator system

A ceramic package is disclosed which comprises a frame member having an ature for accommodating a crystal resonator. The frame member includes mounting clips for supporting the crystal resonator in a desired vibratory mode. A bottom and top lid are then fastened to the frame to enclose the crystal to also enable hermetic sealing in an ultra high vacuum without the use of large deleterious forces. The package provides a hermetic enclosure enabling improved frequency stability and overall reliability.

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Tinton Falls, NJ, United States of America

Erich Hafner