International Business Machines Corporation

Eric V Schnetzer

Huizong Lu

Andrew Ching Tam

Peter Michael Baumgart

Pieter J Kerstens

Michael Barenboim

Hong S Seing

Michael G Lisanke

Ali Reza Taheri

Lanphuong Thi Pena

Peter P Chrusch

Benny Michael Harper

Alan David Dorundo

Iraj Kahkesh Pour

Benjamin Kami

Richard J McCormick

A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. A visible laser beam is also directed along this optical system to an inspection spot on each side of the disk, by which a central portion of each textured spots passes. A beam angle detector detects deflection of a reflection of the inspection beam from this spot in the direction of motion of the disk at this spot. This deflection provides a measure of the topography of the spot.

Optical apparatus for monitoring profiles of textured spots during a

Apparatus for inspecting the surface of a sample includes a wide scanning interferometer, which is used to locate defects, or anomalies in the surface, and a narrow scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.

Optical apparatus for rapid defect analysis

A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.

Laser texturing apparatus with dual laser paths having an independently

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Boynton Beach, FL, United States of America

Eric V Schnetzer