Lam Research Corporation

Eric Tu

Dirk Rudolph

John Folden Stumpf

Ales Janhar

Justin Remulla

Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.

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San Jose, CA, United States of America

Eric Tu