Formfactor, Inc.

Eric T Watje

Christopher C Buckholtz

Robert C Martin

A probe cleaning system automatically detects a surface of a probe cleaning device during a cleaning process by providing a predetermined finish on the surface of the probe cleaning device. The predetermined finish can include a textured or machined finish or a marking, such that the predetermined finish provides contrast against the surface. Cameras in the system automatically focus on the surface, with the predetermined finish. This in-focus condition is related to a distance between probes and the surface. Once an in-focus condition is determined, the system performs an automated cleaning process by interacting the probes with the probe cleaning device.

Method and device to clean probes

Microelectronic spring contacts with fiducial alignment marks for use on a semiconductor wafer contactor or similar apparatus, and methods for making such marks, are disclosed. Each alignment mark is placed on a pad adjacent to a contact tip. The alignment mark is positioned on the pad so that it will not contact the terminal or any other part of a wafer under test. The alignment mark and the contact tip are preferably positioned on the pad in the same lithographic step. Then, the pad and like pads, selected ones of which also have similar alignment marks, are attached to the ends of an array of resilient contact elements. A plurality of alignment marks in accurate registration with a plurality of contact tips on a contactor is thus disclosed. Configurations for ensuring that the alignment marks remain free of debris and easily located for essentially the entire life of the contactor are disclosed, as are various different exemplary shapes of alignment marks.

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Santa Clara, CA, United States of America

Eric T Watje