Qc Optics, Inc.

Eric T Chase

Sergey V Broude

Jay L Ormsby

Carl E Johnson

Nicholas C Allen

Pascal Miller

Abdu Boudour

George S Quackenbos

Lloyd P Quackenbos

Arkady Savikovsky

Abdu Broudour

Koichi Nishine

Bruno Rostaing

David Giroux

Abdu Bou Dour

An improved high sensitivity optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: a first and a second illumination means for illuminating predetermined regions on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

High sensitivity optical inspection system and method for detecting flaws on a diffractive surface

An inspection system and an inspection method, the method including detecting flaws on a surface, determining the size, count, and position of flaws on the surface, providing a representation of the detected flaws by size, count, and position on a display, setting a display threshold value which is a function of a number of particles of a particular size to be displayed on the display, determining when the display threshold is breached and in response adjusting the display to cease displaying those flaws, storing at least one inspection threshold value, and determining when the inspection threshold value is breached and in response outputting an inspection interrupt signal to stop the inspection after the inspection threshold value is breached.

Multistation surface inspection system

A pellicle reflectivity monitoring system comprising a radiation source for directing radiation through a pellicle to an object to be inspected, a sensor device positioned to receive the portion of the radiation reflected by the pellicle, a processor, responsive to the sensor device, for determining the intensity of the portion of the radiation reflected by the pellicle, and a lens assembly, positioned in an optical path between the pellicle and the sensor device, for directing the portion of the radiation reflected by pellicles of different heights onto the sensor device. A comparator device compares the intensity of the radiation directed at the object to be inspected with the intensity of the portion of the radiation reflected by the pellicle and outputs a correction factor based on the comparison in order to compensate for the portion of the radiation reflected by the pellicle.

Pellicle reflectivity monitoring system having means for compensating

A plate holder for a plate surface inspection system, the plate holder including a plate holder body and a calibration plate integral with the plate holder body thereby eliminating the need to load a separate special calibration plate in the plate holder each time the surface inspection system needs to be calibrated.

Plate holder for a surface inspection system

A surface displacement detection system including a detector for detecting displacement of a surface in a direction normal to the surface as the surface revolves; an encoder which divides the surface into N sectors; a signal processor responsive to the detector for calculating the amount of displacement of the surface in each sector of the surface as it revolves; a displacement value look-up table; and a routine for writing to the table a displacement value for each sector once per M revolutions, and an adjustment system including a focussing actuating element, a routine to read displacement value look-up table, a routine to for updating the position of the focussing actuating element for every sector, according to the displacement values stored in the look-up table.

Surface displacement detection and adjustment system

An improved optical inspection system for detecting flaws on a diffractive surface containing surface patterns includes: an ultraviolet illumination means for illuminating a region on the diffractive surface to generate a scattered intensity distribution in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

Optical inspection system and method for detecting flaws on a

A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.

Displacement detection system

A system for processing particle size and position data for a surface under inspection, the system including an air spindle for rotating and a translation stage for translating the surface with respect to a beam of radiation used to detect particles on the surface; a rotational encoder for dividing the surface into a number N of angular vectors; a counter of counting the number of revolutions of the surface; a processor for collecting particle size and position data at each angular vector during each revolution; first and second FIFO memories having at least N address spaces, each address space allocated for a specific angular vector; and a routine for writing the collected particle size and position data to the first memory and for reading particle size and position data from the second memory and switching memories every M revolutions. The FIFO memories are programmed to store only the greater of stored size data and incoming size data.

Data processing system and method for a surface inspection apparatus

A surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scanning a pit or a mound on the surface.

Surface pit and mound detection and discrimination system and method

An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

Inspection apparatus and method for detecting flaws on a diffractive

A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.

Surface defect detection and confirmation system and method

An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits.

Surface pit detection system and method

In the surface inspection apparatus disclosed herein, an elongate array of electro-optical shutters is interposed between a laser beam which scans across the surface to be inspected and a photodetector system which collects light scattered from the surface along the scan line. The shutters are operated in a shifting pattern in synchronism with the scanning means thereby to block unwanted regular signal components.

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Andover, MA, United States of America

Eric T Chase