Submicron Systems, Inc.

Eric Stupp

James S Molinaro

Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff. An alternative embodiment includes a high temperature wafer carrier holder with a sloped handle and internal quartz structural rods to prevent warping of the holder.

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Bernville, PA, United States of America

Eric Stupp