Robert Boschgmbh

Robert Bosch Gmbh

Eric Sebastian Schmidt

Matthias Kuehnel

Christoph Zimmer

Michael Herman

Wenqing Liu

Dusan Radovic

Jan Martin Lubisch

Stefan Patrick Lindt

A computer-implemented method for inferring a device feature of a device produced on a wafer. The method includes: providing a wafer feature model associating a wafer position indicating a position of a produced device on the wafer to a device feature, wherein the wafer feature model is configured to be trained by one or more wafer feature maps and particularly configured as a Gaussian process model, providing a sample device feature of at least one device at a sample wafer position, and inferring the device feature of at least one other device of the wafer depending on the provided wafer feature model.

Method and device for determining a feature for devices produced on a wafer

Growing community of inventors

Heimsheim, Germany

Eric Sebastian Schmidt