Nikon Corporation

Nikon Metrology Nv

Nikon Research Corporation of America

Eric Peter Goodwin

Daniel Gene Smith

Alexander H Cooper

Anthony R Slotwinski

Mina A Rezk

Thomas M Hedges

Zhiqiang Liu

Goldie Goldstein

Michael B Binnard

Alec Paul Robertson

Paul Derek Coon

Brian L Stamper

Michael R Sogard

Alton Hugh Phillips

David Michael Williamson

Michel Pharand

Johnathan Marquez

Matthew Rosa

Jonathan Kyle Wells

Katsura Otaki

Patrick S Chang

Ruslan Kurdyumov

Motofusa Ishikawa

Matthew Parker-McCormick Bjork

Yuki Terui

Wan Qin

Brett William Herr

Heather Lynn Durko

Hidemitsu Toba

Shunsuke Kibayashi

Alexander Cooper

Alec Robertson

The problem of limited throughput in three-dimensional (3D) printing processes is addressed by systems and methods that employ mirrors to receive energy reflected by the melt pool and to redirect such light back to the melt pool, where it may further heat the melt pool. Multiple such passes of reflection from the melt pool and redirection back to the melt pool may substantially increase the efficiency at which the melt pool absorbs the energy, thereby substantially increasing the throughput of the 3D printing process.

Systems and methods for improved melting in three-dimensional printing processes

The problem of measuring the temperature of a 3D printing process is addressed by systems and methods that apply imaging spectrometry to measure blackbody radiation emitted before, during, or after a 3D printing process. The systems and methods utilize a pair of lenses, a field stop, and a wavelength separator to direct a plurality of wavelengths corresponding to the blackbody radiation to pixels of an optical detector. The plurality of wavelengths are analyzed by a controller to determine the temperature of the 3D printed component.

Systems and methods for measuring radiation emitted during a three-dimensional printing process

3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

Metrology for additive manufacturing

A system for measuring a target grating includes an illumination source, a reference transmission grating, a pupil filter, and a detector. The illumination source is disposed to generate an incident light beam that illuminates the reference transmission grating. The reference transmission grating splits the incident light beam into a plurality of diffraction orders. The plurality of diffraction orders interrogates a target grating. The reference transmission grating and the target grating are parallel. The pupil filter allows transmission of a subset of diffraction orders of light that has been diffracted and/or reflected from the target grating after being split again by passing through the reference transmission grating. The detector takes a measurement of the subset of diffraction orders of light after transmission through the pupil filter.

Spatially filtered talbot interferometer for wafer distortion measurement

A position encoder for monitoring relative movement between a first object and a second object includes a grating that is coupled to the first object, and an image sensor assembly that is coupled to the second object. The image sensor includes a first image sensor; a second image sensor that is spaced apart from the first image sensor; an optical element that includes a first optical surface and a second optical surface that is spaced apart from the first optical surface; and an illumination system. The illumination system directs an illumination beam at the optical element to create (i) a first reference beam that is reflected by the first optical surface and directed at the first image sensor, (ii) a second reference beam that is reflected by the second optical surface and directed at the second image sensor, and (iii) a transmitted beam that is transmitted through the optical element and is directed at and impinges on the grating to create a first measurement beam that is diffracted by the grating and directed at the first image sensor, and a second measurement beam that is diffracted by the grating and directed at the second image sensor.

Two-dimensional position encoder

Object interference in biological samples generated by lateral shearing interference microscopes is addressed by a shearing microscope slide comprising a periodic structure having alternating reference and sample regions. In some embodiments, the reference regions are configured to provide references that remove sample overlap in a sheared microscopic measurement. A system for generating sheared microscopic measurements is also provided that comprises an inlet configured to receive a sample material, an outlet configured to release a portion of the sample material, and a periodic structure having a plurality of interleaved reference and sample channels. In some cases, the sample channels are configured to accommodate a flow of sample material from the inlet to the outlet and the reference channels are configured to provide references that remove sample overlap in a sheared microscopic measurement.

Shearing interferometry measurement device for microscopy

System and method for monitoring of performance of a mirror array of a digital scanner with a use of light, illuminating the mirror array at grazing (off-axis) incidence, and an optical imaging system that includes a lateral shearing interferometer (operated in either static or a phase-shifting condition) during and without interrupting the process of exposure of the workpiece with the digital scanner, to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the deformation of a mirror element of the mirror array.

Test of operational status of a digital scanner during lithographic exposure process

Prediction of a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.

Compensation for Goos-Hanchen error in autofocus systems

System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. Determination of height profile of a region-of-interest that is incomparably larger than a FOV of the interferometer objective is performed in time reduced by at least an order of magnitude as compared to time required for the same determination by a vertical scanning interferometer.

System and method for a displacement measurement

A measuring device () for monitoring movement of a first object relative to a second object, the first object or the second object including a target surface (), comprises a first image sensor combination (), a second image sensor combination (), and a control system (A). The image sensor combinations () capture first images and second images of the target surface () over time. The first image sensor combination () includes a first image sensor (A) and a first lens assembly (B). The second image sensor combination () includes a second image sensor (A), and a second lens assembly (B) having a second optical axis (BX) that is at an angle of between thirty degrees and sixty degrees relative to normal to the target surface (). The control system (A) analyzes the first images and the second images to monitor movement of the first object relative to the second object.

Three-dimensional positioning system using surface pattern recognition and interpolation

New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.

Autofocus system and method

System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.

Determination of operability of a digital scanner with shearing interferometry

Fringe-projection autofocus system devoid of a reference mirror. Contributions to error in determination of a target surface profile caused by air non-uniformities are measured based on multiple measurements of the target surface performed at different wavelengths, and/or angles of incidence, and/or grating pitches and subtracted from the measured profile, rendering the system substantially insensitive to presence of air turbulence. Same optical beams forming a fringe irradiance pattern on target surface are used for measurement of the surface profile and reduction of measurement error by the amount attributed to air turbulence.

Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror

An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating. The use of the contraption solves problems of (i) structural complexity of a conventional encoder head for use in an exposure tool, (ii) burdensome alignment of the multitude of optical prisms in the process of forming such encoder head, and (iii) cyclic non-linear errors associated with measurements involving conventional corner-cubes-based encoder heads while, at the same time, reducing the geometrical footprint of the encoder head. The contraption is complemented with a birefringent prismatic element positioned across the axis of the contraption between the cuboid and the birefringent lens.

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Tucson, AZ, United States of America

Eric Peter Goodwin