US Government as Represented by the Secretary of the Army

University of California

University of Illinois

Fei Comapny

Eric Olson

Ivan Petrov

Todor I Donchev

Dongxiang Liao

Charles P Marsh

Jianguo Wen

Ryan Franks

Hendrik Nicolaas Slingerland

Jan Willem Bruggers

Andreas Karl Schmid

Raymond Wagner

Thomas Duden

Jeroen Van De Water

Johannes Van Den Oetelaar

Adriaan Huibert Dirk Ottevanger

A method for using a reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. The method may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, the method provides a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Method of use of reusable sample holding device permitting ready loading of very small wet samples

A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Reusable sample holding device permitting ready loading of very small wet samples

A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (). The manipulator clasps the round sample holder between two members (A,B), said members mounted on actuators (A,B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.

Manipulator for rotating and translating a sample holder

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Champaign, IL, United States of America

Eric Olson