Pfeiffer Vacuum Gmbh

Eric Mandallaz

Serge Brandolin

Thibaut Bourrilhon

Christophe Santi

A pump unit includes a rough-vacuum pump and a Roots vacuum pump connected in series and upstream of the rough-vacuum pump in the direction of flow of the pumped gases. The Roots vacuum pump has three pumping stages in which the rotors are designed to be driven simultaneously in rotation by a motor of the Roots vacuum pump. A ratio of the flow rate generated by the first pumping stage of the rough-vacuum pump in the direction of flow of the pumped gases over the flow rate generated by the last pumping stage of the rough-vacuum pump is less than or equal to four.

Pump unit

A dry type primary vacuum pump is provided, including at least two pumping stages mounted in series between a suction and a discharge of the pump; two rotors extending in the pumping stages and being configured to rotate synchronously in a reverse direction to drive a gas to be pumped between the suction and the discharge; an injection device configured to distribute a purge gas in at least one pumping stage, the injection device including at least one injector and at least one injection valve with an on or off control configured to be interposed between a purge gas supply source and the injector; and a control device configured to control opening and closing of the injection valve to inject a purge gas by successive pulses into the at least one pumping stage. A method for controlling the injection of a purge gas the vacuum pump is also provided.

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Annecy, France

Eric Mandallaz