International Business Machines Corporation

Eric M Coker

Anthony K Stamper

Zhong-Xiang He

Timothy Dooling Sullivan

Douglas Duane Coolbaugh

Anthony Correale, Jr

Ebenezer E Eshun

Hazara Singh Rathore

Birendra N Agarwala

Richard Andre Wachnik

Matthew D Moon

Jed Hickory Rankin

James William Adkisson

William C Leipold

Bette L Bergman Reuter

Christopher Karl Magg

A method for correction of defects in lithography masks includes determining the existence of mask defects on an original mask, and identifying a stitchable zone around each of the mask defects found on the original mask. Each of the identified stitchable zones on the original mask is blocked out such that circuitry within the stitchable zones is not printed out during exposure of the original mask. A repair mask is formed, the repair mask including corrected circuit patterns from each of the identified stitchable zones.

Method for correction of defects in lithography masks

A method for forming an interconnect structure, the interconnect structure comprising: a lower level wire having a side and a bottom, the lower level wire comprising: a lower core conductor and a lower conductive liner, the lower conductive liner on the side and the bottom of the lower level wire; an upper level wire having a side and a bottom, the upper level wire comprising an upper core conductor and an upper conductive liner, the upper conductive liner on the side and the bottom of the upper level wire; and the upper conductive liner in contact with the lower core conductor and also in contact with the lower conductive liner in a liner-to-liner contact region.

Dual damascene multi-level metallization

A BEOL thin-film resistor adapted for flexible integration rests on a first layer of ILD. The thickness of the first layer of ILD and the resistor thickness combine to match the nominal design thickness of vias in the layer of concern. A second layer of ILD matches the resistor thickness and is planarized to the top surface of the resistor. A third layer of ILD has a thickness equal to the nominal value of the interconnections on this layer. Dual damascene interconnection apertures and apertures for making contact with the resistor are formed simultaneously, with the etch stop upper cap layer in the resistor protecting the resistive layer while the vias in the dual damascene apertures are formed.

Integrated thin-film resistor with direct contact

An interconnect structure, comprising: a lower level wire having a side and a bottom, the lower level wire comprising: a lower core conductor and a lower conductive liner, the lower conductive liner on the side and the bottom of the lower level wire; an upper level wire having a side and a bottom, the upper level wire comprising an upper core conductor and an upper conductive liner, the upper conductive liner on the side and the bottom of the upper level wire; and the upper conductive liner in contact with the lower core conductor and also in contact with the lower conductive liner in a liner-to-liner contact region.

Dual-damascene metallization interconnection

A trough adjusted optical proximity correction for vias which takes into account the topography on a wafer created by prior processing. The vias are classified into one of two groups, coincident vias which have an edge coincident with an edge of the trough, and noncoincident vias which do not have an edge coincident with an edge of the trough, by analyzing the via and trough designs. Any coincident via is marked as valid for an optical proximity correction (OPC). Any noncoincident via is marked invalid for OPC. OPC is then performed to the via level. Only vias marked as valid for OPC will keep the correction. All other vias will keep their original design size. Alternatively, coincident vias can be simply treated differently from noncoincident vias. For instance, coincident vias can be subjected to an aggressive OPC correction, while noncoincident vias are subjected to a less aggressive OPC correction.

Trough adjusted optical proximity correction for vias

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Burlington, VT, United States of America

Eric M Coker