National Technology & Engineering Solutions of Sandia, LLC

Sandia Corporation

Eric Langlois

Todd Monson

Jamin Ryan Pillars

Christian Lew Arrington

Gregory Nolan Nielson

Murat Okandan

Paul J Resnick

Michael Baker

Dale L Huber

Gregory Robert Bogart

Patrick Sean Finnegan

Robert J Anderson

Jack David Flicker

Andrew E Hollowell

Judith Maria Lavin

Sigifredo Gonzalez

Olga Lavrova

Michael J K Abere

Nicholas Sonny Gurule

A method and system for determining the state of one or both of an electrical conductor or an associated system utilizing a non-invasive sensor and a magnetostrictive response from the current of the electrical conductor. The method includes providing a sensor assembly including a magnetostrictive resonator sensor and a signal detector. A state of one or both of the electrical conductor or the associated system is determined with the fault detector in response to a first frequency profile and a second frequency profile obtained with the magnetostrictive resonator sensor. A fault monitoring system utilizing a magnetostrictive resonator sensor is also disclosed.

Magnetostrictive current sensor method and system

A magnetic micro-device and process to manufacture the same is disclosed. The magnetic micro-device has a near-zero conductivity magnetic nanocomposite film layer with a plurality of apertures through which a corresponding plurality of electrical conductors (vias) pass. Due to the near-zero conductivity of the magnetic nanocomposite film layer, the vias are self-insulating. The presence of the magnetic nanocomposite film layer results in greater inductance than that possible with an air core (or core-less) magnetic micro-device. Potential magnetic micro-devices include toroid micro-inductors, solenoid micro-inductors, toroid micro-transformers, and solenoid micro-transformers. Additional potential magnetic micro-devices include generators, motors, electromagnetic switches, and voice coils (for speakers or microphones). The process used to manufacture the magnetic micro-device can be scaled to cost-effectively produce large numbers of the magnetic micro-device.

Self-insulating metal vias in magnetic micro-devices

Plasma micro nozzle adapters having various configurations and operating principles are disclosed. The plasma micro nozzle adapter is employed with a commercial plasma jet printer to produce smaller printed features than those possible with the original plasma jet printer. In a first class of embodiments, the plasma micro nozzle adapter narrows a plasma jet using electrostatic or magnetostatic lensing, permitting the printing of ceramic, metallic, dielectric, or plastic features with line widths of 10 μm or less. In a second class of embodiments, the plasma micro nozzle adapter narrows the plasma jet using a gas sheath. By adjusting the flow rate or pressure of the gas used to form the gas sheath, the cross-sectional shape of the plasma jet may form, for example, an ellipse, thereby controlling the width of the printed feature. A third class of embodiments employs both electrostatic (or magnetostatic) lensing along with the gas sheath.

Plasma micronozzle adapter

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

Magnetoelastically actuated MEMS device and methods for its manufacture

A microfabricated magnetic resonator is provided. The microfabricated magnetic resonator has one or more resonator portions, each of which is a magnetoelastic resonating structure having a maximum circumference or maximum linear dimension in at least one direction that is less than 1000 &#x3bc;m. At least one of the resonator portions comprises an electrodeposited material comprising at least a cobalt constituent and an iron constituent.

Microfabricated magnetostrictive resonator

The present invention relates to magnetoelastic resonators, sensors, and tunable devices, as well as methods for making such components. The resonators can be used as tags and/or sensors. In general, the resonators include one or more micron-sized resonator portions affixed on a substrate. For use as a tag, each tag includes a plurality of resonator portions that allow for multiplexed coding, and methods for making tags and arrays of such tags include use of electrodeposition processes. In particular embodiments, these components include an electrodeposited material that exhibits magnetostrictive properties.

Electrodeposition processes for magnetostrictive resonators

Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same

Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode

An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.

Micromachined force-balance feedback accelerometer with optical displacement detection

A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.

Optically transduced MEMS gyro device

MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

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Albuquerque, NM, United States of America

Eric Langlois