International Business Machines Corporation

Eric Kay

John W Coburn

Tung J Chuang

Bernard Despax

Circuit writing on a substrate is achieved by selectively exposing to a laser portion of a very thin film of a medium comprising electrically isolated conducting clusters in a dielectric matrix material. The preferred materials are gold in highly crosslinked polytetrafluoroethylene.

Circuit writing process

A substrate which forms a volatile fluoride is etched and directionality is achieved using vibrationally excited SF.sub.6 which has been exposed to laser irradiation. The substrate is etched through a mask having openings smaller than the diffraction limit of the laser light.

Etching process with vibrationally excited SF.sub.6

A plasma process for forming a polymer film containing metal therein includes the steps of providing an electrode of a metal that can be etched by a halogen, providing a substrate for the polymer film to be deposited thereon, and passing a halocarbon monomer through a plasma system so that the metal etched from the electrode forms a volatile halide and is incorporated in the polymer film that is deposited on the substrate.

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San Jose, CA, United States of America

Eric Kay