Silmach

Centre National De La Recherche Scientifique

Université De Franche Comte

Etat Francais Represente Par Le Delegue General Pour L'armement

Eric Joseph

Patrice Minotti

Gilles Bourbon

Patrice Le Moal

Paul Vescovo

Vincent Walter

Cyrille Hibert

Louvigné Pierre-François

Philippe Hélin

Pierre-François Louvigné

The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.

Method and device for moving an element to be driven using an actuating element formed by etching in a semiconductor material

A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.

A drive device formed by etching a wafer. The drive device includes a drive element that can sequentially mesh with a driven element and an actuating element that can displace the drive element according to a hysteresis movement thereby driving the driven element. Placement of the drive element on an outer edge of the wafer enables an interfacing of the drive element with a driven element placed opposite therefrom. A clockwork mechanism including a drive device of the aforementioned type and an input gear that can be rotationally driven by the drive device is also provided.

Drive device, particularly for a clockwork mechanism

A MEMS device is provided which includes a driven element having a series of teeth. The MEMS device includes a driving element operable to engage the driven element when the driving element is in a meshed position with the series of teeth. A driving actuator of the MEMS device is operable to (i) move the driving element with a hysteresis-type motion from an initial position into the meshed position to engage the driven element, (ii) move the driving element causing the driven element to move while the driving element is in the meshed position, (iii) move the driving element away from the meshed position, and (iv) cause the driving element to return to the initial position while the driving element is not in the meshed position.

MEMS device comprising an actuator generating a hysteresis driving motion

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Chaucenne, France

Eric Joseph